D6F Series MEMS Flow Sensors
- RoHS Compliant
A gas flow sensor is capable of "measuring mass flow" independent of temperature and pressure.
- High Accuracy: ±3%RD (25-100%F.S.) is realized by linear temperature correction using ASIC technology.
- High Sensitivity:Omron’s unique MEMS technology allows detection of very low air velocities.
- Compact:The product size is reduced by using the world-smallest class size MEMS sensor element.
- Three variations available: Flow Rate, Velocity, and Differential Pressure. Please refer to data sheet for details.
- Downloadable data
- CAD
- manual
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Related Contents
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This web page provides an excerpt from a datasheet. Refer to Product Datasheet and other applicable documents for more information. You can download CAD data from the "Model list".
Catalog
| Data type | File name | Date of update |
|---|---|---|
| Data sheet | Data sheet D6F | |
| Selection Guide | Sensor SelectionGuide |
Operation manual / software
| Data type | File name | Date of update |
|---|---|---|
| User’s Manual | MEMS Flow Sensor D6F-series User’s Manual | |
| User’s Manual | MEMS Flow Sensor D6F-A7D/-AB71D User’s Manual | |
| User’s Manual | MEMS Flow Sensor D6F-P User’s Manual | |
| User’s Manual | MEMS Flow Rate Sensor D6F-W/D6F-V User’s Manual | |
| User’s Manual | MEMS Differential pressure Sensor D6F-PH User’s Manual |
*In order to download this software, you must agree to the license agreement.
MODEL LIST
Relevant information for each model is listed. CAD data can be downloaded after logging in or registering as a member.
- *1See here for 2D,3D CAD data specifications.
- *2External site (Ultra Librarian) opens in a new window.
Ultra Librarian uniquely created ECAD data based on the information provided by OMRON. Please note that OMRON does not guarantee the accuracy, concurrence or completeness of ECAD data.
