D6F series MEMS flow sensor (Flow Rate/ Velocity)
A gas flow sensor is capable of "measuring mass flow" independent of temperature and pressure.
- High Accuracy: ±3%RD (25-100%F.S.) is realized by linear temperature correction using ASIC technology.
- High Sensitivity:Omron’s unique MEMS technology allows detection of very low air velocities.
- Compact:The product size is reduced by using the world-smallest class size MEMS sensor element.
- Two variations available: Flow Rate and Velocity. Please refer to data sheet for details.
D6F-20A5-000, D6F-30A7-000, D6F-PLG1:
Last order Date:Mar.31,2026
Related Contents
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This web page provides an excerpt from a datasheet. Refer to Product Datasheet and other applicable documents for more information. Models for which CAD data is available can be checked from the "Model list".
Catalog
| Data type | File name | Date of update |
|---|---|---|
| Data sheet | Data sheet D6F | |
| Selection Guide | Sensor Selection Guide |
Operation manual / software
| Data type | File name | Date of update |
|---|---|---|
| User’s Manual | MEMS Flow Sensor D6F-series User’s Manual | |
| User’s Manual | MEMS Flow Sensor D6F-A7D/-AB71D User’s Manual | |
| User’s Manual | MEMS Flow Sensor D6F-P User’s Manual | |
| User’s Manual | MEMS Flow Rate Sensor D6F-W/D6F-V User’s Manual | |
| User’s Manual | MEMS Differential pressure Sensor D6F-PH User’s Manual |
*In order to download this software, you must agree to the license agreement.
MODEL LIST
Relevant information for each model is listed. CAD data can be downloaded after logging in or registering as a member.
| Model | 2D/3D CAD*1 | ECAD*2 | Buy online | RoHS Certification*3 | Product Status |
|---|---|---|---|---|---|
| D6F-01A1-110 | Login/Register | Login/Register | Download | Scheduled for discontinuation | |
| D6F-01N2-000 | Login/Register | Login/Register | Download | Scheduled for discontinuation | |
| D6F-02A1-110 | Login/Register | Login/Register | Download | Scheduled for discontinuation | |
| D6F-02L2-000 | Login/Register | Login/Register | Download | Scheduled for discontinuation | |
| D6F-02L7-000 | Login/Register | Login/Register | Download | In production | |
| D6F-03A3-000 | Login/Register | Login/Register | Download | Product Discontinuation | |
| D6F-05N2-000 | Login/Register | Login/Register | Download | Scheduled for discontinuation | |
| D6F-05N7-000 | Login/Register | Login/Register | Download | In production | |
| D6F-10A5-000 | Login/Register | Login/Register | Download | In production | |
| D6F-10A6-000 | Login/Register | Login/Register | Download | In production | |
| D6F-10A61-000 | Login/Register | Login/Register | Download | In production | |
| D6F-10A7-000 | Login/Register | Login/Register | Download | In production | |
| D6F-10A7D-000-0 | Login/Register | Login/Register | Download | In production | |
| D6F-20A5-000 | Login/Register | Login/Register | Download | In production | |
| D6F-20A6-000 | Login/Register | Login/Register | Download | In production | |
| D6F-20A61-000 | Login/Register | Login/Register | Download | In production | |
| D6F-20A7D-000-0 | Login/Register | Login/Register | Download | In production | |
| D6F-30A7-000 | Login/Register | Login/Register | Download | In production | |
| D6F-30AB71-000 | Login/Register | Login/Register | Download | In production | |
| D6F-50A5-000 | Login/Register | Login/Register | Download | In production |
- *1See here for 2D,3D CAD data specifications.
- *2External site (Ultra Librarian) opens in a new window.
Ultra Librarian uniquely created ECAD data based on the information provided by OMRON. Please note that OMRON does not guarantee the accuracy, concurrence or completeness of ECAD data. - *3Rohs Certificate may not be listed.
Please contact us or distributors for products that are not listed.
