List of Recommended MOS FET Relays for Semiconductor Testing Equipment (ATE)
Many MOS FET relays are used in semiconductor inspection equipment for signal switching applications. High-frequency signal transmission, high-speed response, high temperature compatibility, miniaturization, and high voltage compatibility are some of the applications for which MOS FET relays can be used to achieve efficient inspection.Select the one that fits your application from the list of OMRON's recommended product formats for ATE below.

- Low CxR type
- High-speed response type
- High Temperature Compatible type
- Ultra-Compact type
- High Load Voltage type
- Other types
Low CxR type
MOS FET relays with low on resistance and low inter-terminal capacitance, suitable for controlling high-frequency signals.
Click on each model to see the product details.
Load voltage (AC Peak/DC)(V) | Model | Contact form | Continuous load current (AC Peak/DC)(mA) | Maximum resistance with output ON, Typical (Ω) | Capacitance between terminals with output, Typical (pF) | Current leakage when the relay is open, Max (nA) | Package |
---|---|---|---|---|---|---|---|
20 | G3VM-21PR10 | 1a | 200 | 3 | 0.8 | 1 | USOP4 |
20 | G3VM-21PR1 | 1a | 450 | 0.6 | 5 | 1 | USOP4 |
20 | G3VM-21PR11 | 1a | 900 | 0.18 | 40 | 1 | USOP4 |
20 | G3VM-21UR10 | 1a | 200 | 3 | 0.8 | 1 | VSON4 |
20 | G3VM-21UR1 | 1a | 450 | 0.8 | 5 | 1 | VSON4 |
20 | G3VM-21UR11 | 1a | 1000 | 0.18 | 40 | 1 | VSON4 |
40 | G3VM-41PR12 | 1a | 100 | 15 | 0.3 | 1 | USOP4 |
40 | G3VM-41PR6 | 1a | 120 | 10 | 1 | 0.2 | USOP4 |
40 | G3VM-41PR10 | 1a | 120 | 12 | 0.45 | 1 | USOP4 |
40 | G3VM-41PR11 | 1a | 140 | 7 | 0.7 | 1 | USOP4 |
40 | G3VM-41PR5 | 1a | 300 | 1 | 10 | 1 | USOP4 |
40 | G3VM-41UR12 | 1a | 100 | 15 | 0.3 | 1 | VSON4 |
40 | G3VM-41UR10 | 1a | 120 | 12 | 0.45 | 1 | VSON4 |
40 | G3VM-41UR11 | 1a | 140 | 5 | 0.7 | 1 | VSON4 |
40 | G3VM-41UR4 | 1a | 250 | 2 | 5 | 1 | VSON4 |
40 | G3VM-41QR10 | 1a | 120 | 11 | 0.45 | 1 | S-VSON(L)4 |
50 | G3VM-51PR | 1a | 300 | 1 | 12 | 1 | USOP4 |
50 | G3VM-51UR | 1a | 300 | 1 | 12 | 1 | VSON4 |
60 | G3VM-61QR | 1a | 400 | 1.1 | 12 | 1000 | S-VSON(L)4 |
60 | G3VM-61QR3 | 1a | 400 | 1.1 | 12 | 1000 | S-VSON(L)4 |
60 | G3VM-61YR | 1a | 400 | 1.1 | 12 | 1000 | WSON4 |
High-speed response type
MOS FET relays with short turn-ON/turn-OFF time to reduce inspection time
Click on each model to see the product details.
Load voltage (AC Peak/DC)(V) | Model | Contact form | Continuous load current (AC Peak/DC)(mA) | Turn-ON time Max (ms) | Turn-OFF time Max (ms) | Package |
---|---|---|---|---|---|---|
20 | G3VM-21PR10 | 1a | 200 | 0.2 | 0.2 | USOP4 |
20 | G3VM-21UR10 | 1a | 200 | 0.2 | 0.2 | VSON4 |
40 | G3VM-41PR10 | 1a | 120 | 0.2 | 0.3 | USOP4 |
40 | G3VM-41PR11 | 1a | 140 | 0.2 | 0.2 | USOP4 |
40 | G3VM-41PR12 | 1a | 100 | 0.2 | 0.2 | USOP4 |
40 | G3VM-41PR6 | 1a | 120 | 0.2 | 0.3 | USOP4 |
40 | G3VM-41QR10 | 1a | 120 | 0.2 | 0.3 | S-VSON(L)4 |
40 | G3VM-41UR10 | 1a | 120 | 0.2 | 0.3 | VSON4 |
40 | G3VM-41UR11 | 1a | 140 | 0.2 | 0.2 | VSON4 |
40 | G3VM-41UR12 | 1a | 100 | 0.2 | 0.2 | VSON4 |
60 | G3VM-61PR1 | 1a | 120 | 0.2 | 0.2 | USOP4 |
60 | G3VM-61QR3 | 1a | 400 | 0.25(0.13)* | 0.2(0.2)* | S-VSON(L)4 |
60 | G3VM-61UR1 | 1a | 120 | 0.2 | 0.2 | VSON4 |
60 | G3VM-61YR | 1a | 400 | 0.25(0.2)* | 0.2(0.2)* | WSON4 |
*In the case of If=5mA, RL=200Ω, VDD=20V. The values in parentheses ( ) represent the case of If=10mA, RL=200Ω, VDD=20V.
High Temperature Compatible type
MOSFET relays for high-temperature testing of power semiconductors and resistant to temperature rise during high-density mounting.
Click on each model to see the product details.
Load voltage (AC Peak/DC)(V) | Model | Contact form | Continuous load current (AC Peak/DC)(mA) | Max ambient operating temperature(℃) | Package |
---|---|---|---|---|---|
30 | G3VM-31QV2H | 1a | 1500 | 125 | S-VSON(L)4 |
60 | G3VM-61QV3H | 1a | 1000 | 125 | S-VSON(L)4 |
60 | G3VM-61QV3L | 1a | 400 | 125 | S-VSON(L)4 |
60 | G3VM-61QV4H | 1a | 400 | 125 | S-VSON(L)4 |
Ultra-Compact type
Compact and lightweight type MOS FET relays suitable for multiple or high-density mounting on PCB boards.
Click on each model to see the product details.
Load voltage (AC Peak/DC)(V) | Model | Contact form | Continuous load current (AC Peak/DC)(mA) | Length(mm) | Width(mm) | Height(mm) | Weight(g) | Package |
---|---|---|---|---|---|---|---|---|
30 | G3VM-31QR | 1a | 1300 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
30 | G3VM-31QVH | 1a | 1500 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
30 | G3VM-31QVL | 1a | 1500 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
30 | G3VM-31QV2H | 1a | 1500 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
40 | G3VM-41QR10 | 1a | 120 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
60 | G3VM-61YR | 1a | 400 | 2 | 1.45 | 0.8 | 0.01 | WSON4 |
60 | G3VM-61QR | 1a | 400 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
60 | G3VM-61QR3 | 1a | 400 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
60 | G3VM-61QR2 | 1a | 1000 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
60 | G3VM-61QVH | 1a | 400 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
60 | G3VM-61QV2H | 1a | 1000 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
60 | G3VM-61QV2L | 1a | 1000 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
60 | G3VM-61QV3H | 1a | 1000 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
60 | G3VM-61QV3L | 1a | 400 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
60 | G3VM-61QV4H | 1a | 400 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
100 | G3VM-101QR1 | 1a | 650 | 2 | 1.45 | 1.3 | 0.01 | S-VSON(L)4 |
High Load Voltage type
MOS FET relays suitable for high voltage testing of power semiconductors, etc.
Click on each model to see the product details.
Load voltage (AC Peak/DC)(V) | Model | Contact form | Continuous load current (AC Peak/DC)(mA) | Package |
---|---|---|---|---|
600 | G3VM-601AY1/601DY1 | 1a | 90 | DIP4 |
600 | G3VM-601AY2/601DY2 | 1a | 90 | DIP4 |
600 | G3VM-601CR/601FR | 1a | 600 | DIP8 |
600 | G3VM-601G | 1a | 90 | SOP4 |
600 | G3VM-601G1 | 1a | 70 | SOP4 |
Other types
The above is a partial list of models in our MOS FET relays lineup. If you require a different type, please use the parametric search below and select the type that meets your specifications.