D6F series MEMS flow sensor (Flow Rate/ Velocity)

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A gas flow sensor is capable of "measuring mass flow" independent of temperature and pressure.

  • High Accuracy: ±3%RD (25-100%F.S.) is realized by linear temperature correction using ASIC technology.
  • High Sensitivity:Omron’s unique MEMS technology allows detection of very low air velocities.
  • Compact:The product size is reduced by using the world-smallest class size MEMS sensor element.
  • Two variations available: Flow Rate and Velocity. Please refer to data sheet for details.

D6F-01A1-110, D6F-02A1-110, D6F-05N2-000, D6F-01N2-000, D6F-02L2-000:
Last order Date:Jan.31,2025

DOWNLOAD

This web page provides an excerpt from a datasheet. Refer to Product Datasheet and other applicable documents for more information. Models for which CAD data is available can be checked from the "Model list".

Catalog

Data type File name Date of update
Data sheet Data sheet D6F
Selection Guide Sensor Selection Guide

Operation manual / software

Data type File name Date of update
User’s Manual MEMS Flow Sensor D6F-series User’s Manual
User’s Manual MEMS Flow Sensor D6F-A7D/-AB71D User’s Manual
User’s Manual MEMS Flow Sensor D6F-P User’s Manual
User’s Manual MEMS Flow Rate Sensor D6F-W/D6F-V User’s Manual
User’s Manual MEMS Differential pressure Sensor D6F-PH User’s Manual

*In order to download this software, you must agree to the license agreement.

MODEL LIST

Relevant information for each model is listed. CAD data can be downloaded after logging in or registering as a member.

Model 2D/3D CAD*1 ECAD*2 Buy online Product Status
D6F-01A1-110 Login/Register Login/Register
Scheduled for discontinuation
D6F-01N2-000 Login/Register Login/Register
Scheduled for discontinuation
D6F-02A1-110 Login/Register Login/Register
Scheduled for discontinuation
D6F-02L2-000 Login/Register Login/Register
Scheduled for discontinuation
D6F-02L7-000 Login/Register Login/Register
In production
D6F-03A3-000 Login/Register Login/Register
Product Discontinuation
D6F-05N2-000 Login/Register Login/Register
Scheduled for discontinuation
D6F-05N7-000 Login/Register Login/Register
In production
D6F-10A5-000 Login/Register Login/Register
In production
D6F-10A6-000 Login/Register Login/Register
In production
D6F-10A61-000 Login/Register Login/Register
In production
D6F-10A7-000 Login/Register Login/Register
In production
D6F-10A7D-000-0 Login/Register Login/Register
In production
D6F-20A5-000 Login/Register Login/Register
In production
D6F-20A6-000 Login/Register Login/Register
In production
D6F-20A61-000 Login/Register Login/Register
In production
D6F-20A7D-000-0 Login/Register Login/Register
In production
D6F-30A7-000 Login/Register Login/Register
In production
D6F-30AB71-000 Login/Register Login/Register
In production
D6F-50A5-000 Login/Register Login/Register
In production
  • *1See here for 2D,3D CAD data specifications.
  • *2External site (Ultra Librarian) opens in a new window.
    Ultra Librarian uniquely created ECAD data based on the information provided by OMRON. Please note that OMRON does not guarantee the accuracy, concurrence or completeness of ECAD data.