Product Details Portlet

D6F-D MEMS 2-Axis Flow Sensor

Save energy with airflow sensing. Optimize air conditioning control without sacrificing quality.

  • Two-axis sensing to detect not only the airflow speed but also the airflow direction.
  • Link up to 32 Sensors to achieve visualization over a wide range.
  • Compact package for greater installation flexibility.

Last order Date:Mar.31,2022

RoHS Compliant
Model 2D/3D CAD ECAD(Download symbol,FootPrint,3DCAD)
* External site (Ultra Librarian) opens in a new window.
D6F-D010A32-00 Download Download
(*) Ultra Librarian uniquely created ECAD data based on the information provided by OMRON. Please note that OMRON does not guarantee the accuracy, concurrence or completeness of ECAD data.
Note: This web page provides an excerpt from a datasheet. Refer to Product Datasheet and other applicable documents for more information.
Applicable Medium
Flow Range Model
Air (See note.) ±1.0m/s D6F-D010A32-00
Note: Dry gas must not contain large particles, eg dust, oil, mist.
Absolute maximum rating (Ta = 25°C)
Item Specifications
Interface RS-485
Wire Connection Multi-drop connection with daisy chain wiring (32 devices max.)
Communication system 2 wires : Half duplex
Baud rate 9600bps or 38400bps : DIP switch* selectable
Protocol Modbus-RTU
Transmission code Binary
Data length 8 bit
Stop bit 1 bit
Parity None
Response time 250 ms max.
Command interval 10 ms min. (Minimum wait time after receiving the response from the device to the consecutive command transmission)
Slave address 1 to 32 (0x01 to 0x20) : DIP switch* selectable
Termination resistor Built-in termination resistor : DIP switch* selectable
* The communication settings of this device can be set by DIP switch configuration as shown in Fig. 3. All bits are switched off before shipment.

Item Rating
Power-supply Voltage 4.5 to 5.5 VDC
Storage Temperature -10 to 55°C (without freezing and condensation)
Operating Temperature 0 to 40°C
Storage Humidity 30 to 85%
Operating Humidity 30 to 80%
Note: With no condensation or icing.

Item Characteristic
Flow Velocity Range ±1.0m/s in each axis
Accuracy ±3%F.S. in each axis
Flow Direction Range 0 to 360°
Accuracy ±15° (at 0.3m/s)
Note: 1. Flow velocity is determined by our standard wind tunnel (300 mm square), and this does not indicate the flow velocity specified in Measurement law. (Fig.1 shows our standard wind tunnel)

  (Unit :mm)

Precautions for Correct Use

Applicable medium and Device mounting

• Depending on the mounting position and the ambient environment, the foreign object such as dust can adhere to the inside of the device and can cause clogging of the part of flow path. As a result, the device may not perform as intended. And, the characteristic specified in this document may not be maintained. Please use the device after enough ex-ante evaluation under the condition of actual use in order to confirm the performance and safety in the application.
• For the gasses other than the applicable medium, please use the device in your responsibility after the confirmation of its performance and safety. However, do not use in the presence of inflammable gases, such as hydrogen, methane, ethane, and a liquefied petroleum gas. In addition, do not use with corrosive gases (such as chlorine, sulfur, acid, alkali, ammonia etc.)
• The direction of the arrow on top of the body shows the positive direction of the device output in each axis. Please install the device in a correct direction corresponding to the direction of the flow. With the wrong installation, the device cannot measure flow direction correctly.
• After installation, the device may not perform as intended by the presence of a flow obstacle around the device.
• After Installation, the device operation and its performance should be checked before actual use in the application.
• Horizontal device orientation (top cover side up) is recommended. If the device orientation is not horizontal, the output may shift as an offset more than +/3%F.S.. For more details of offset compensation features, please refer to the communication specification.
• The device may not operate properly, if a foreign object or a flow obstacle is placed around the entrance of the flow path.

Use environment

Please do not use the device in the following environments:
• Places where the device directly receives radiant heat from an apparatus.
• Places where the device is exposed to water, salt water, water droplets and oil splash.
• Places where the device is exposed to direct sunlight.
• Places with volatile gas, inflammable gas or corrosive gas
(such as chlorine, sulfur, acid, alkali, ammonia etc.)
• Places where frequent temperature changes.
• Places where dusty condition.
• Places with the possibility of freezing and dew condensation.
• Places where the device receives large magnitudes of vibration and shock.
• Places where the device receives strong electric field effect or magnetic field effect.

Noise Countermeasures

• Please check electrical noise condition before actual use. The device may not perform as intended by the effect from electrical noise.
• The voltage input that exceeds absolute maximum ratings must not be applied. This can damage the electrical circuit of the device. Place the protection circuit as needed, so that the voltage to the lines will not exceed absolute maximum ratings.
• Take particular care to install away from AC power transformers, live mains power lines and high power magnetic circuits.
• The device may not operate properly where the place with the equipment that generates strong high-frequency wave or surge.
• Please attach surge absorber or noise filter to the peripheral equipment that generates noise.
• In order to prevent inductive noise, wiring of the device must be separated from the power line with the high voltage and large current.
• When using with a switching regulator or DC-DC convertor, switching noise may affect the device operation.


• Please handle with countermeasure against static electricity.
• Do not make a direct solder connection to the integral terminals; this may result in damage, and possibly cause failure. It is recommended to use the standard straight CAT5e LAN cable and to ensure correct connection.
• Do not mix up the wiring. This can damage the device and cause the failure.
• Power must be supplied from the single source. And, do not apply different voltage to the device from each connector. This may damage the device and also the host equipment (master).
• After wiring cables, please do not apply excessive pulling force to the connector. Tensile force of 12N or more can cause the failure.
• Changing DIP switch setting must be done when in power off state.


• When using the multiple devices on the same bus, please make sure that there is no device that has the same slave address, please refer to the communication specification (No.MDPE-12-0146).
• When using built-in termination resistor, please enable it only to one device at the end of the bus.
• Please make sure that there are no multiple devices with termination resistors enabled.
• Please make sure that baud rate setting must be same for the host equipment (master) on the same bus.

Sensor Applications

The D6F is built for use with general-purpose devices. In particular, when using the D6F for applications with the safety requirements described below, take steps to ensure system and device safety through measures such as fail-safe designs, redundant designs, and regular inspections.
•Safety devices for ensuring safety for persons
•Transportation equipment control (such as applications to stop operation)
•Aviation and space equipment
•Nuclear power equipment
Do not use the D6F for applications in which D6F operation would directly affect human life.

Fluids, Pipe Mounting and Sensor Installation

All D6F Models
(1) Use clean fluids. Install a filter or mist separator on the inflow pipe. Failure to do so may result in malfunction or changes in characteristics due to dust or mist. This does not apply to the D6F-W, D6F-V, D6F-P and D6F-PH.
(2) Do not use corrosive gases other than the specified applicable fluids (such as chlorine, sulfur, acid,or alkali) . Doing so may cause product failure.
(3) The specified performance may not be obtained if the D6F is used for fluids other than the specified applicable fluids.
(4) After removing the Sensor from the package, do not allow foreign particles to enter the piping. Foreign particles in the piping may cause product failure.
(5) Install the Sensor so that the fluid flows in the direction indicated by the arrow on the Sensor. Correct measurements cannot be obtained if the fluid flows in the wrong direction. This does not apply to the D6F-V, D6F-P and D6F-PH.
(6) It is recommended that the Sensor (except for the D6F-A3) be mounted horizontally. If it is not mounted horizontally, an error of ±1% FS or higher may result.
(7) Install the Sensor on a flat surface. Incorrect installation may damage the Sensor and make it impossible to obtain correct measurements.
(8) Make sure that the power to all equipment is turned OFF before you install the Sensor. Installing the Sensor while the power supply is ON may result in electrical shock or abnormal operation.
(9) Always check operation after installation.
(10) Do not drop the Sensor or disassemble the cover.

Operating Environment

Do not use the Sensor in the following locations:
•Locations directly subject to heat radiated from heating equipment
•Locations subject to water or oil
•Locations subject to direct sunlight
•Locations subject to intense temperature changes
•Locations subject to icing or condensation
•Locations subject to excessive vibration or shock

Countermeasures against Noise

Noise may make it impossible to obtain correct measurements.
Consider the following countermeasures.
•Allow as much space as possible between the Sensor and devices that generates high frequencies (such as high-frequency welders and high-frequency sewing machines) or surges.
•Attach surge absorbers or noise filters to noise-generating devices that are near the Sensor (in particular, equipment with inductance, such as motors, transformers, solenoids, and magnetic coils).
(It also helps to separate pipes and ducts, and to use shielded cables.)

Power Supply

•Force of connector terminal is 20 N max. Do not add strength more than tension of wire bending to connector at wiring. Install the connector coaxially to the fitting axis with holding all wires. And pulling angle should be within 15 degrees.
•Use the applicable connectors. Directly soldering the connection terminals will cause product failure. (except for the D6F-PH)
•Check the terminal names and polarity and wire the power supply correctly. Incorrect wiring will cause failure of internal components.
•When using a commercially available switching regulator, ground
the FG (frame ground) and G (ground) terminals.


The sensor is a precision device, and if large shock and load is applied, it may cause a failure or characteristic change. Please do not use the sensor which is added excessive shock to the terminals, discompose the cover, or has fallen.
•The sensor shall only be handled in electrostatic discharge protected areas (EPA) under protected and controlled conditions

RoHS Directive

The RoHS mark is displayed on the packing of products for which the six substances banned by the RoHS Directive have been abolished (both in processing and in the electronic components mounted to the PCBs).
* RoHS marking may be terminated if it is later determined that parts that were previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts.

RoHS Compliance Criteria

The following standards are used to determine RoHS compliance for the six banned substances.
(Items to which the RoHS Directive is not applicable are not given.)
•Lead: 1,000 ppm max.
•Hexavalent chromium: 1,000 ppm max.
•Mercury: 1,000 ppm max.
•PBB: 1,000 ppm max.
•Cadmium: 100 ppm max.
•PBDE: 1,000 ppm max.